Semiconductor Grade Quartz Cylinder
Semiconductor grade quartz cylinders are used in semiconductor etching as the base material for quartz rings.
Characteristics:
High purity, no microbubbles, low hydroxyl group, etc.
Product Size(mm):
| OD Range | ID Range |
|---|---|
| 300~350 | 210~240 |
| 350~400 | 240~300 |
| 400~450 | 330~350 |
Chemical Properties(ppm):
| Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr | OH Content |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 8 | 0.6 | 0.05 | 0.01 | 0.10 | 0.1 | 0.2 | 0.05 | 0.05 | 0.10 | 1.3 | 1.0 | <110 |
Physical Properties:
| Items | Values |
|---|---|
| Density (g/cm3) | 2.2 |
| Heat Conductivity (w/m.k 1000°C) | 2.28 |
| Coefficient of Thermal Expansion (°C-1 1000°C) | 5.5×10-7 |
| Softening Point (°C) | 1670 |
| Annealing Point (°C) | 1210 |
| Strain Point (°C) | 1110 |
Coefficient of Thermal Expansion & Viscosity
